CVC Products 2800 Load Lock Dual Process Chamber Sputtering System with Handler

Description

CVC Products 2800LL-2  Load Locked Dual Process Chamber Sputtering System with Handler
System base pressure process is 1 x 10^-7 while the
Load Lock base pressure is 4 x 10^-7. Process working pressure is in the range of 2 to 3millitorr.
The Unique transfer pivot arm for substrate holder uses rotary Ferrofluidic seals.
The High Vacuum Pumping Systems uses the CTI 8 Cryotorr package complemented with high
performance 6" ASA electro-pneumatic gate valves and  electro-pneumatic process throttle valves.
The system uses two (2) ENI OEM 25 13.56 Mhz solid state RF power units.
Cathode assembly's are 8" magnetrons circular Quick Change Targets which allows for
cathode assembly replacement in minutes.
The Ion Beam Source is the CVC ICS 660 7.5" circular beam ideal for cleaning.
The 350 degrees C Heater uses six radiant quartz heat lamps.
Viewports are large 6" x 12" provides adequate operator viewing.
System controls are PLC driven  multiple process program menus along with a series of color
graphic display screens using the Multiview Control Software Interface.
Provides Real Time Display of system status, bar graphs and
programmed
values.
Chamber Process
Gases:
1.
Three
(3)
Mass
Flow
Controllers
Availabl
a.
Argon
b.
Nitrogen
c.
Oxygen
Load
Lock
Chamber:
1.
Ion
Mill
a.
Ion
Mill
rate
is
approximately
50
Angstroms
per
minute
2.
Has
Chamber
Heater
a.
Operating
T
emperature
is
approximately
250
degrees
Celsius
Process
Chamber
1:
1.
Has
Three
(3)
T
argets
a.
Titanium
b.
Ti-W
(10%
wt
Titanium
to
90%
wt
Tungsten)
c.
Nickel
2.
Has
1
RF
Power
Supply
Process Chamber
2:
1.
Has
Three
(3)
T
argets
a.
Aluminum
b.
T
antalum
C. Titanium
2.
Has
1
RF
Power
Supply
System Support Equipment
Includes:
1.
Three
(3)
CTI
8
Cryo
Pumps
&
Compressors
2.
Alcatel
M2033
Mechanical
Vacuum
Pump
Substrate
Handing
Options:
1.
150MM
Round
Substrate
Pallet
capable
of
holding
8
substrates
2.
200MM
Round
Substrate
Pallet
capable
of
holding
6
substrates
3.
Customized
200MM
to
150
Adaptable
Pallet
for
Edge
Protection